Comment asml SNF 2011-08-17 09:10:05: HOTSPOT FOUND AT 11 OCLOCK TOP/ LEFT

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Aug 17 09:10:06 PDT 2011


One hotspot at Top/Left  ( 11 Oclock )   edge of wafer. Cleaned the
 E-chuck with   tooling. Retest OK.




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