Shutdown asml SNF 2011-08-23 19:03:37: System error

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Aug 23 19:03:38 PDT 2011


When first wafer entered the system, it got stuck on the E-chuck.  I tried FAST STARTUP and FULL STARTUP but both failed.  Machine reports error in restarting the Wafer Handling system.  My wafer is still stuck on the E-chuck.




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