Shutdown asml SNF 2011-08-23 19:03:37: System error

bchui at bchui at
Tue Aug 23 19:03:38 PDT 2011

When first wafer entered the system, it got stuck on the E-chuck.  I tried FAST STARTUP and FULL STARTUP but both failed.  Machine reports error in restarting the Wafer Handling system.  My wafer is still stuck on the E-chuck.

More information about the asml-pcs mailing list