Shutdown asml SNF 2011-08-23 19:03:37: System error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 24 08:12:08 PDT 2011


Wafer failed transfer from Dipod input to E-chuck due to vacuum sense error. Recovered wafer from system and did a full hardware reset. Attempted to cycle a clean test wafer through the system but had the same error. Recovered the test wafer and cleaned the Input Dipod surface. Retest of wafer handling OK. Exposed a hotspot wafer- Also OK. 




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