Shutdown asml SNF 2011-08-26 15:23:48: wafer is stuck
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Fri Aug 26 15:23:49 PDT 2011
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Shutdown asml SNF 2011-08-26 15:23:48: wafer is stuck
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Gary is trying to get the wf out.
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Shutdown asml SNF 2011-08-26 15:23:48: wafer is stuck
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