Shutdown asml SNF 2011-08-26 15:23:48: wafer is stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Aug 26 16:30:09 PDT 2011


Removed the stranded wafer from the E-table. Did an E-table clean while I had the stone out. Re-initialized all hardware. Tested system by exposing a hotspot wafer. All OK.




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