From ludwig at snf.stanford.edu Fri Dec 2 13:20:53 2011 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 2 Dec 2011 13:20:53 -0800 Subject: Problem asml SNF 2011-12-02 13:20:53: loading arm stuck Message-ID: wafers inside, cannot take in or out From ludwig at snf.stanford.edu Fri Dec 2 13:21:10 2011 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 2 Dec 2011 13:21:10 -0800 Subject: Shutdown asml SNF 2011-12-02 13:21:10: loading arm stuck Message-ID: From gsosa at snf.stanford.edu Fri Dec 2 13:38:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 2 Dec 2011 13:38:12 -0800 Subject: Shutdown asml SNF 2011-12-02 13:21:10: loading arm stuck Message-ID: Could not pick up wafer at input port. Recovered and retried wafers. All OK. From bchui at snf.stanford.edu Fri Dec 2 19:40:35 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 2 Dec 2011 19:40:35 -0800 Subject: Shutdown asml SNF 2011-12-02 19:40:35: Dialog screen froze up Message-ID: when I tried to edit a job file. Probably just needs a reboot. I've left a message with the SNF off-hours hotline; hopefully someone can reboot the machine for the weekend users. From gsosa at snf.stanford.edu Fri Dec 2 22:50:05 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 2 Dec 2011 22:50:05 -0800 Subject: Shutdown asml SNF 2011-12-02 19:40:35: Dialog screen froze up Message-ID: Reset the application software. Did full hardware reset. Cycled wafers with test job. All OK. From gsosa at snf.stanford.edu Fri Dec 2 22:50:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 2 Dec 2011 22:50:15 -0800 Subject: Problem asml SNF 2011-12-02 13:20:53: loading arm stuck Message-ID: archive From simba85 at snf.stanford.edu Sat Dec 3 19:39:18 2011 From: simba85 at snf.stanford.edu (simba85 at snf.stanford.edu) Date: Sat, 3 Dec 2011 19:39:18 -0800 Subject: Comment asml SNF 2011-12-03 19:39:17: error Message-ID: it gives me "a system error occured 1. Abort Batch clear stepper, 2. Abort bactch clear litho cluster." If I click 1., it gives me back my wafer. From ehe at snf.stanford.edu Sat Dec 3 19:53:01 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 3 Dec 2011 19:53:01 -0800 Subject: Comment asml SNF 2011-12-03 19:53:00: worked normally for me. Message-ID: From gsosa at snf.stanford.edu Mon Dec 5 15:23:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Dec 2011 15:23:52 -0800 Subject: Comment asml SNF 2011-12-05 15:23:51: Hotspot 12/5 Message-ID: 1 hotspot at major flat. Cleaned echuck with tooling. Retest OK. From cursive at snf.stanford.edu Wed Dec 7 17:10:53 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 7 Dec 2011 17:10:53 -0800 Subject: Problem asml SNF 2011-12-07 17:10:52: wafer stuck inside Message-ID: Please don't use it. Mary will call the staff to check. From gsosa at snf.stanford.edu Wed Dec 7 20:50:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Dec 2011 20:50:29 -0800 Subject: Problem asml SNF 2011-12-07 17:10:52: wafer stuck inside Message-ID: Wafer failed transfer from Pre-aligner to Dipod. Retrieved stranded wafer. Inspected wafer- All OK nothing unusual. Re-initialized system. Re-ran and exposed users wafer- All OK. Cycled test wafers through the tool- No problems. From lupin000 at snf.stanford.edu Sat Dec 10 03:08:03 2011 From: lupin000 at snf.stanford.edu (lupin000 at snf.stanford.edu) Date: Sat, 10 Dec 2011 03:08:03 -0800 Subject: Comment asml SNF 2011-12-10 03:08:02: Hinge part of output cover is broken Message-ID: This is not a serious damage to run ASML but the hinge part of output cover is broken because of material's fatigue. It needs to be fixed. From wangss at snf.stanford.edu Sat Dec 10 08:16:39 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sat, 10 Dec 2011 08:16:39 -0800 Subject: Problem asml SNF 2011-12-10 08:16:39: output port cover Message-ID: noticed that left side of the output port cover is loose. Need to tighten the screws. From yiwu at snf.stanford.edu Sat Dec 10 11:22:43 2011 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sat, 10 Dec 2011 11:22:43 -0800 Subject: Comment asml SNF 2011-12-10 11:22:42: output port cover is broken Message-ID: open with caution From maxms at snf.stanford.edu Sat Dec 10 17:19:05 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sat, 10 Dec 2011 17:19:05 -0800 Subject: Problem asml SNF 2011-12-10 17:19:04: will not restart Message-ID: will not restart. called mary, due to the water cooling system being down. will not be up until water cooling system fixed and the machine stabilizes. From gsosa at snf.stanford.edu Sat Dec 10 18:08:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 10 Dec 2011 18:08:12 -0800 Subject: Shutdown asml SNF 2011-12-10 18:08:11: PCw Problem Message-ID: waiting for process cooling water system to be restored. From gsosa at snf.stanford.edu Sun Dec 11 12:32:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:32:19 -0800 Subject: Comment asml SNF 2011-12-10 03:08:02: Hinge part of output cover is broken Message-ID: Replaced the hinges. From gsosa at snf.stanford.edu Sun Dec 11 12:32:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:32:25 -0800 Subject: Problem asml SNF 2011-12-10 08:16:39: output port cover Message-ID: Replaced the hinges. From gsosa at snf.stanford.edu Sun Dec 11 12:32:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:32:30 -0800 Subject: Comment asml SNF 2011-12-10 11:22:42: output port cover is broken Message-ID: Replaced the hinges. From gsosa at snf.stanford.edu Sun Dec 11 12:39:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:39:48 -0800 Subject: Problem asml SNF 2011-12-10 17:19:04: will not restart Message-ID: Cooling water system back online now. Restarted the C&T unit on stepper and did a full start-up. Estimated time for stepper to be fully stable is 12/11/11at 14:09. Until then, system can be used for non critical processing. As of 12:45 the focus is at about .3um of nominal. If possible shoot test wafers to verify process. From gsosa at snf.stanford.edu Sun Dec 11 12:39:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:39:55 -0800 Subject: Shutdown asml SNF 2011-12-10 18:08:11: PCw Problem Message-ID: Cooling water system back online now. Restarted the C&T unit on stepper and did a full start-up. Estimated time for stepper to be fully stable is 12/11/11at 14:09. Until then, system can be used for non critical processing. As of 12:45 the focus is at about .3um of nominal. If possible shoot test wafers to verify process. From gsosa at snf.stanford.edu Sun Dec 11 12:40:50 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:40:50 -0800 Subject: Comment asml SNF 2011-12-11 12:40:49: Update 12/11/11 Message-ID: Cooling water system back online now. Restarted the C&T unit on stepper and did a full start-up. Estimated time for stepper to be fully stable is 12/11/11at 14:09. Until then, system can be used for non critical processing. As of 12:45 the focus is at about .3um of nominal. If possible shoot test wafers to verify process. From bmcguirk at snf.stanford.edu Mon Dec 12 10:02:04 2011 From: bmcguirk at snf.stanford.edu (bmcguirk at snf.stanford.edu) Date: Mon, 12 Dec 2011 10:02:04 -0800 Subject: Comment asml SNF 2011-12-12 10:02:03: ASML combi reticle Message-ID: All, Some time this weekend the ASML combi reticle was flipped upside down and placed back into the ASML SMIF box. In some cases this can cause reticle and machine damage. In the future, please do not handle ASML calibration reticles without permission and as a general rule, if you are manually loading any reticle, just remeber: "Stars front and barcode on the left" regards, Bert Mcguirk ASML field service From gsosa at snf.stanford.edu Mon Dec 12 17:56:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 12 Dec 2011 17:56:34 -0800 Subject: Comment asml SNF 2011-12-12 17:56:34: 6" Demo Message-ID: ASML 6" demo in progress. Also preparations for tool shutdown. Tool us not available to users. From gsosa at snf.stanford.edu Tue Dec 13 16:07:45 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Dec 2011 16:07:45 -0800 Subject: Shutdown asml SNF 2011-12-13 16:07:44: Shutdown for Renovation Message-ID: