Comment asml SNF 2011-12-03 19:39:17: error

simba85 at snf.stanford.edu simba85 at snf.stanford.edu
Sat Dec 3 19:39:18 PST 2011

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it gives me "a system error occured 1. Abort Batch clear stepper, 2. Abort bactch clear litho cluster."
If I click 1., it gives me back my wafer.

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