Comment asml SNF 2011-12-05 15:23:51: Hotspot 12/5
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Mon Dec 5 15:23:52 PST 2011
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Comment asml SNF 2011-12-03 19:53:00: worked normally for me.
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Problem asml SNF 2011-12-07 17:10:52: wafer stuck inside
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1 hotspot at major flat. Cleaned echuck with tooling. Retest OK.
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Comment asml SNF 2011-12-03 19:53:00: worked normally for me.
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Problem asml SNF 2011-12-07 17:10:52: wafer stuck inside
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