Problem asml SNF 2011-12-07 17:10:52: wafer stuck inside

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Dec 7 20:50:29 PST 2011


Wafer failed transfer from Pre-aligner to Dipod. Retrieved stranded wafer. Inspected wafer- All OK nothing unusual. Re-initialized system. Re-ran and exposed users wafer- All OK. Cycled test wafers through the tool- No problems.




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