Shutdown asml SNF 2011-12-10 18:08:11: PCw Problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Dec 11 12:39:55 PST 2011


Cooling water system back online now. Restarted the C&T unit on stepper and did a full start-up. Estimated time for stepper to be fully stable is 12/11/11at 14:09. Until then, system can be used for non critical processing. As of 12:45 the focus is at about .3um of nominal. If possible shoot test wafers to verify process. 




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