From lindaohara at snf.stanford.edu Tue Feb 1 10:46:57 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 1 Feb 2011 10:46:57 -0800 Subject: Comment asml SNF 2011-02-01 10:46:57: Convert to 6" Message-ID: ASML is on 6" From joho at snf.stanford.edu Tue Feb 1 16:11:11 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 1 Feb 2011 16:11:11 -0800 Subject: Comment asml SNF 2011-02-01 16:11:10: System up for 4in TOP SIDE ONLY Message-ID: System up for 4in TOP SIDE ONLY From joho at snf.stanford.edu Wed Feb 2 09:26:04 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 2 Feb 2011 09:26:04 -0800 Subject: Comment asml SNF 2011-02-02 09:26:03: Starting MPM Message-ID: Starting the Monthly PM for the ASML From joho at snf.stanford.edu Wed Feb 2 15:47:41 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 2 Feb 2011 15:47:41 -0800 Subject: Comment asml SNF 2011-02-02 15:47:41: ASML Stepper Day1 MPM Completed Message-ID: ASML Stepper Day1 Monthly PM Completed. System is up for Top Side only, and should be available for both top and 3dalign tomorrow afternoon after MPM Day2 From takashifuse at snf.stanford.edu Wed Feb 2 17:44:26 2011 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Wed, 2 Feb 2011 17:44:26 -0800 Subject: Problem asml SNF 2011-02-02 17:44:26: Energy sensor temperature out of range Message-ID: The error "Energy sensor temperature out of range" was occured during exposure. I aborted my process. and I can't logoff to ASML server. From joho at snf.stanford.edu Thu Feb 3 08:26:59 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 3 Feb 2011 08:26:59 -0800 Subject: Comment asml SNF 2011-02-03 08:26:59: Starting MPM Day 2 Message-ID: Starting Day 2 of the Monthly PM From joho at snf.stanford.edu Thu Feb 3 14:57:01 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 3 Feb 2011 14:57:01 -0800 Subject: Problem asml SNF 2011-02-02 17:44:26: Energy sensor temperature out of range Message-ID: Energy sensor temperature out of range is a soft bug in the system. Tool is okay too use. System is up for 4in top side only. Reticle table had to be adjusted and Fast-tools reinstalled. 3dalign ETA is tomorrow afternoon around 1400 hour. From joho at snf.stanford.edu Thu Feb 3 14:57:56 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 3 Feb 2011 14:57:56 -0800 Subject: Comment asml SNF 2011-02-03 14:57:55: ASML Stepper is UP for FRONT SIDE ONLY Message-ID: The ASML Stepper is up for Front Side ONLY. There were a lot of updates today, which extended the time used. 3DAlign should be available tomorrow afternoon around 1400 hour. From hongyuc at snf.stanford.edu Thu Feb 3 22:21:55 2011 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Thu, 3 Feb 2011 22:21:55 -0800 Subject: Problem asml SNF 2011-02-03 22:21:53: the dialogue is gone... Message-ID: accidentally closed the dialogue and don't know how to get it back... sorry for the inconvenience I caused... From lindaohara at snf.stanford.edu Fri Feb 4 08:16:03 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Feb 2011 08:16:03 -0800 Subject: Problem asml SNF 2011-02-03 22:21:53: the dialogue is gone... Message-ID: The dialogue window is present now. Hongyuc your reticle is in the box under the granite. Linda O From lindaohara at snf.stanford.edu Fri Feb 4 08:34:30 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Feb 2011 08:34:30 -0800 Subject: Comment asml SNF 2011-02-04 08:34:29: Starting Day3 MPM Message-ID: From joho at snf.stanford.edu Fri Feb 4 14:07:07 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 4 Feb 2011 14:07:07 -0800 Subject: Comment asml SNF 2011-02-04 14:07:06: ASML Stepper is up for Front and Back Align Message-ID: Completed 3DAlignment Setup today (linda). The system is available now for Front and Back side alignment. From lindaohara at snf.stanford.edu Tue Feb 8 12:06:31 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 8 Feb 2011 12:06:31 -0800 Subject: Comment asml SNF 2011-02-08 12:06:30: ASML Released Reservations 12:00-14:00 Message-ID: From gsosa at snf.stanford.edu Thu Feb 10 09:16:45 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Feb 2011 09:16:45 -0800 Subject: Comment asml SNF 2011-02-10 09:16:44: Hotspot 02/10 Message-ID: Hotspot on test wafer near major flat. Cleaned echuck with tooling. Retest OK. From gsosa at snf.stanford.edu Mon Feb 14 09:07:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Feb 2011 09:07:36 -0800 Subject: Comment asml SNF 2011-02-14 09:07:35: Hotspots 2/14 Message-ID: several small hotspots on perimeter of wafer. Cleaned E-chuck with tooling and retested. Re-test OK. From lindaohara at snf.stanford.edu Mon Feb 14 14:17:39 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 14 Feb 2011 14:17:39 -0800 Subject: Comment asml SNF 2011-02-14 14:17:39: ASML Free Until 15:00 Message-ID: From lindaohara at snf.stanford.edu Tue Feb 15 14:46:45 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 15 Feb 2011 14:46:45 -0800 Subject: Comment asml SNF 2011-02-15 14:46:44: Hotspot 02/15/11 Message-ID: Hotspot found at 4 o'clock & 6 o'clock. Gary cleaned E-Chuck. Hotspot ck ok, no hotspots. From joho at snf.stanford.edu Wed Feb 16 09:04:03 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 16 Feb 2011 09:04:03 -0800 Subject: Comment asml SNF 2011-02-16 09:04:03: Starting DEMO Message-ID: Starting ASML DEMO From gsosa at snf.stanford.edu Wed Feb 16 15:23:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 16 Feb 2011 15:23:38 -0800 Subject: Shutdown asml SNF 2011-02-16 15:23:37: Stepper is Down 2/16 Message-ID: The stepper will not be up tonight. There were some unforseen problems with the X-Y stage laser. ASML will replace the laser tomorrow and do required setups and testing. From joho at snf.stanford.edu Thu Feb 17 14:44:53 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:44:53 -0800 Subject: Shutdown asml SNF 2011-02-16 15:23:37: Stepper is Down 2/16 Message-ID: - ASML Stepper is up. System ok now. From joho at snf.stanford.edu Thu Feb 17 14:45:56 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:45:56 -0800 Subject: Comment asml SNF 2011-02-17 14:45:56: ASML DEMO Complete Message-ID: System fully initialized, and stable. ASML DEMO is complete, and the system is fully qualified for both top side and 3d align. From ericp at snf.stanford.edu Thu Feb 17 23:50:00 2011 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 17 Feb 2011 23:50:00 -0800 Subject: Problem asml SNF 2011-02-17 23:49:59: system froze- mid wafer exposure Message-ID: On the second wafer, the system froze after exposing about half of the dies on that wafer. System gave the option "Abort Batch- clear stepper", and then froze completely. There are a total of 4 wafers in the system: 2 in the out cassette, one on the p-chuck and one on the e-chuck. There are Three masks in the system. One is loaded into the column, and two are in the pod. I've left a wafer box, and three mask carriers on the machine. If you could please leave these on the table where the ASML reticle box is kept, I would appreciate it. Thank you. From ericp at snf.stanford.edu Thu Feb 17 23:51:10 2011 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 17 Feb 2011 23:51:10 -0800 Subject: Shutdown asml SNF 2011-02-17 23:51:10: system down, see prev. problem report. Message-ID: Even the mouse on the computer is frozen. From gsosa at snf.stanford.edu Fri Feb 18 08:21:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Feb 2011 08:21:13 -0800 Subject: Problem asml SNF 2011-02-17 23:49:59: system froze- mid wafer exposure Message-ID: There was a un-recoverable leveling problem on wafer #2. Also wafer hanfing system went inactive. Reset the mouse and reset wafer handling. Did a full start-up and recovered stranded wafers. Also unloaded the reticle box. Useres wafers and masks are on top of the table. Cycled system with test job- All OK. From gsosa at snf.stanford.edu Fri Feb 18 08:21:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Feb 2011 08:21:18 -0800 Subject: Shutdown asml SNF 2011-02-17 23:51:10: system down, see prev. problem report. Message-ID: There was a un-recoverable leveling problem on wafer #2. Also wafer hanfing system went inactive. Reset the mouse and reset wafer handling. Did a full start-up and recovered stranded wafers. Also unloaded the reticle box. Useres wafers and masks are on top of the table. Cycled system with test job- All OK. From lindaohara at snf.stanford.edu Fri Feb 18 10:14:15 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 18 Feb 2011 10:14:15 -0800 Subject: Shutdown asml SNF 2011-02-18 10:14:15: Wafer Stage Error Message-ID: Wafer stuck in system. Wafer stage hardware error. From joho at snf.stanford.edu Fri Feb 18 15:01:31 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 18 Feb 2011 15:01:31 -0800 Subject: Shutdown asml SNF 2011-02-18 10:14:15: Wafer Stage Error Message-ID: System failed to level the wafer because of contamination on the back side of the wafer. Found contamination on the Wafer Handling (WH) Robot, the WH pre-aligner, the Di-Pod Unit, and the Exposure Chuck. This contamination was visable to the naked eye. Thoroughly cleaned all wafer surfaces; verified no more hot spots. Calibrated the system for front side and backside alignment; verified with performance tests. From slcheng at snf.stanford.edu Fri Feb 18 18:40:43 2011 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Fri, 18 Feb 2011 18:40:43 -0800 Subject: Problem asml SNF 2011-02-18 18:40:43: system error Message-ID: system error occured during the litho step. After reset the stepper, it went through. From xuanwu at snf.stanford.edu Mon Feb 21 03:35:34 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Mon, 21 Feb 2011 03:35:34 -0800 Subject: Problem asml SNF 2011-02-21 03:35:34: Similar System Error Message-ID: I was able to retrieve my wafer through material handling From lindaohara at snf.stanford.edu Wed Feb 23 09:28:08 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 23 Feb 2011 09:28:08 -0800 Subject: Comment asml SNF 2011-02-23 09:28:08: Hotspot Message-ID: Hotspot at 7 o'clock position, ASML CSE coming in to clean E-Chuck From lindaohara at snf.stanford.edu Wed Feb 23 12:18:02 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 23 Feb 2011 12:18:02 -0800 Subject: Comment asml SNF 2011-02-23 12:18:01: Hotspot ck ok Message-ID: Saeed cleaned E-Chuck, hotspot ck ok From lindaohara at snf.stanford.edu Wed Feb 23 12:19:43 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 23 Feb 2011 12:19:43 -0800 Subject: Comment asml SNF 2011-02-23 12:19:42: ASML Released Reservations 12:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Feb 24 09:00:35 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 24 Feb 2011 09:00:35 -0800 Subject: Comment asml SNF 2011-02-24 09:00:35: Hotspot ck Message-ID: Hotspot in center of wafer. Gary is going to clean E-Chuck and retest Hotspot Ck From lindaohara at snf.stanford.edu Thu Feb 24 11:38:50 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 24 Feb 2011 11:38:50 -0800 Subject: Comment asml SNF 2011-02-24 11:38:50: ASML Released Reservations 12:00-14:00 Message-ID: From gsosa at snf.stanford.edu Thu Feb 24 11:40:54 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 24 Feb 2011 11:40:54 -0800 Subject: Comment asml SNF 2011-02-24 11:40:53: Hotspot 02/24 Message-ID: Hotspot in center of wafer. Cleaned e-chuck with tooling and retested. Re-test OK. From gsosa at snf.stanford.edu Fri Feb 25 06:58:46 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:58:46 -0800 Subject: Comment asml SNF 2011-01-06 11:26:17: Hotspot Ck Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:58:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:58:51 -0800 Subject: Comment asml SNF 2011-01-07 09:47:16: Hotspot ck Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:58:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:58:55 -0800 Subject: Comment asml SNF 2011-01-18 09:19:17: Hotspot ck Thank you Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:58:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:58:59 -0800 Subject: Comment asml SNF 2011-01-20 09:30:25: Hotspot 1/20 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:04 -0800 Subject: Comment asml SNF 2011-01-28 09:56:05: ASML Released Reservations 10:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:08 -0800 Subject: Comment asml SNF 2011-01-31 10:17:34: Hotspot 1/31 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:13 -0800 Subject: Comment asml SNF 2011-02-01 10:46:57: Convert to 6" Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:20 -0800 Subject: Comment asml SNF 2011-02-01 16:11:10: System up for 4in TOP SIDE ONLY Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:30 -0800 Subject: Comment asml SNF 2011-02-02 09:26:03: Starting MPM Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:35 -0800 Subject: Comment asml SNF 2011-02-02 15:47:41: ASML Stepper Day1 MPM Completed Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:41 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:41 -0800 Subject: Comment asml SNF 2011-02-03 08:26:59: Starting MPM Day 2 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:47 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:47 -0800 Subject: Comment asml SNF 2011-02-03 14:57:55: ASML Stepper is UP for FRONT SIDE ONLY Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:51 -0800 Subject: Comment asml SNF 2011-02-04 08:34:29: Starting Day3 MPM Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 06:59:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 06:59:56 -0800 Subject: Comment asml SNF 2011-02-04 14:07:06: ASML Stepper is up for Front and Back Align Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 07:00:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 07:00:00 -0800 Subject: Comment asml SNF 2011-02-08 12:06:30: ASML Released Reservations 12:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 07:00:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 07:00:14 -0800 Subject: Comment asml SNF 2011-02-10 09:16:44: Hotspot 02/10 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 07:00:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 07:00:19 -0800 Subject: Comment asml SNF 2011-02-14 09:07:35: Hotspots 2/14 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Feb 25 07:00:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Feb 2011 07:00:23 -0800 Subject: Comment asml SNF 2011-02-14 14:17:39: ASML Free Until 15:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Feb 28 10:34:39 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Feb 2011 10:34:39 -0800 Subject: Comment asml SNF 2011-02-28 10:34:38: Hotspot 2/28 Message-ID: 1 faint hotspot on test wafer near top/center. Cleaned E-chuck with tooling. Re-test OK.