Problem asml SNF 2011-02-02 17:44:26: Energy sensor temperature out of range

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Wed Feb 2 17:44:26 PST 2011


The error "Energy sensor temperature out of range" was occured during exposure.
I aborted my process. and I can't logoff to ASML server.




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