Problem asml SNF 2011-02-02 17:44:26: Energy sensor temperature out of range

joho at snf.stanford.edu joho at snf.stanford.edu
Thu Feb 3 14:57:01 PST 2011


Energy sensor temperature out of range is a soft bug in the system. Tool is okay too use. System is up for 4in top side only. Reticle table had to be adjusted and Fast-tools reinstalled. 3dalign ETA is tomorrow afternoon around 1400 hour.




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