Shutdown asml SNF 2011-02-16 15:23:37: Stepper is Down 2/16
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Wed Feb 16 15:23:38 PST 2011
The stepper will not be up tonight. There were some unforseen problems with the X-Y stage laser. ASML will replace the laser tomorrow and do required setups and testing.
More information about the asml-pcs
mailing list