Shutdown asml SNF 2011-02-16 15:23:37: Stepper is Down 2/16

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Feb 16 15:23:38 PST 2011


The stepper will not be up tonight. There were some unforseen problems with the X-Y stage laser. ASML will replace the laser tomorrow and do required setups and testing. 




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