Problem asml SNF 2011-02-17 23:49:59: system froze- mid wafer exposure

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 18 08:21:13 PST 2011


There was a un-recoverable leveling  problem on wafer #2. Also wafer hanfing system went inactive. Reset the mouse and reset wafer handling. Did a full start-up and recovered stranded wafers. Also unloaded the reticle box. Useres wafers and masks are on top of the table. Cycled system with test job- All OK.




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