Shutdown asml SNF 2011-02-18 10:14:15: Wafer Stage Error

joho at snf.stanford.edu joho at snf.stanford.edu
Fri Feb 18 15:01:31 PST 2011


System failed to level the wafer because of contamination on the back side of the wafer. Found contamination on the Wafer Handling (WH) Robot, the WH pre-aligner, the Di-Pod Unit, and the Exposure Chuck. This contamination was visable to the naked eye. Thoroughly cleaned all wafer surfaces; verified no more hot spots. Calibrated the system for front side and backside alignment; verified with performance tests.




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