Problem asml SNF 2011-02-18 18:40:43: system error

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Fri Feb 18 18:40:43 PST 2011

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system error occured during the litho step. After reset the stepper, it went through.

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Next message: Problem asml SNF 2011-02-21 03:35:34: Similar System Error
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