From gsosa at snf.stanford.edu Tue Jan 4 15:47:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:47:42 -0800 Subject: Comment asml SNF 2011-01-04 15:47:41: System Down 1/4 Message-ID: The stepper is still down for the annual PM. In addition, the vendor is troubleshooting a reticle table problem. Work will continue tomorrow morning From gsosa at snf.stanford.edu Wed Jan 5 16:51:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Jan 2011 16:51:19 -0800 Subject: Comment asml SNF 2011-01-04 15:47:41: System Down 1/4 Message-ID: Annual PM Completed- Tool up and ready for use. ASML completed the annual PM and the stepper is back up with certain conditions, so please read carefully. If you are doing zero layer and are going to expose "XPA marks", Please delay your processing until after 3:00PM tomorrow(1/6). ASML Applications group will do a machine constants change tomorrow morning that will affect the XPA mark performance. Further details related to this change will be forthcoming. If you are exposing standard alignment marks for "Zero Layer" or are exposing "Work already in Progress", the system is up and ready to go. If you have any problems, please report them in Coral Thanks.... The Litho Team From gsosa at snf.stanford.edu Wed Jan 5 16:51:46 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Jan 2011 16:51:46 -0800 Subject: Shutdown asml SNF 2010-12-15 11:20:26: ASML Annual PM in Progress Message-ID: Annual PM Completed- Tool up and ready for use. ASML completed the annual PM and the stepper is back up with certain conditions, so please read carefully. If you are doing zero layer and are going to expose "XPA marks", Please delay your processing until after 3:00PM tomorrow(1/6). ASML Applications group will do a machine constants change tomorrow morning that will affect the XPA mark performance. Further details related to this change will be forthcoming. If you are exposing standard alignment marks for "Zero Layer" or are exposing "Work already in Progress", the system is up and ready to go. If you have any problems, please report them in Coral Thanks.... The Litho Team From gsosa at snf.stanford.edu Wed Jan 5 16:53:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Jan 2011 16:53:40 -0800 Subject: Problem asml SNF 2011-01-05 16:53:39: Important- Please Read Message-ID: Annual PM Completed- Tool up and ready for use. ASML completed the annual PM and the stepper is back up with certain conditions, so please read carefully. If you are doing zero layer and are going to expose "XPA marks", Please delay your processing until after 3:00PM tomorrow(1/6). ASML Applications group will do a machine constants change tomorrow morning that will affect the XPA mark performance. Further details related to this change will be forthcoming. If you are exposing standard alignment marks for "Zero Layer" or are exposing "Work already in Progress", the system is up and ready to go. If you have any problems, please report them in Coral Thanks.... The Litho Team From lindaohara at snf.stanford.edu Thu Jan 6 11:26:18 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 6 Jan 2011 11:26:18 -0800 Subject: Comment asml SNF 2011-01-06 11:26:17: Hotspot Ck Message-ID: Large Hotspot found at 4 o'clock position. Gary cleaned E-Chuck. Found, no hotspots, ok. FRIENDLY REMINDER FOR THE NEW YEAR, PLEASE CHECK THE BACK OF YOUR WAFERS BEFORE THEM THROUGH THE ASML. Thanks, Linda O From mahnaz at snf.stanford.edu Thu Jan 6 14:28:33 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 Jan 2011 14:28:33 -0800 Subject: Problem asml SNF 2011-01-05 16:53:39: Important- Please Read Message-ID: During annual pm, we saw a shift on XPA marks and we made the appropriate adjustment. Please read the attachment on this email I will put a copy next to the tool. What does this mean to you: If you are using pm marks, there are NO CHANGES for you. ...continue as usual. If you are starting a new run/lot today 1/6/11 No CHANGES for you either. If you have used XPA marks to expose your wafers before shutdown and you are doing an overlay ( more than one layer). Please read the attachment and follow the instruction. To do the correction you need to go to Define a batch page ( on the bottom of the page) Click on Alignment M1/Red X Y ( need to enter -.8) Ping, Linda, Gary and I will happily show you and go over this if you need help with it so do not hesitate to ask. I will put a copy of the pages next to the tool. mahnaz From lindaohara at snf.stanford.edu Fri Jan 7 09:47:17 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 7 Jan 2011 09:47:17 -0800 Subject: Comment asml SNF 2011-01-07 09:47:16: Hotspot ck Message-ID: Hotspot found at 2:00 o'clock position. Gary cleaned E-Chuck and found no hotspots, hotspot ck ok From lindaohara at snf.stanford.edu Fri Jan 7 10:09:25 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 7 Jan 2011 10:09:25 -0800 Subject: Comment asml SNF 2011-01-07 10:09:25: ASML Released Reservations 10:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Mon Jan 10 11:27:48 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 11:27:48 -0800 Subject: Problem asml SNF 2011-01-10 11:27:47: Drift in pm marks??? Message-ID: It seems that a lab member experiencing a shift in pm marks Mary has done the pm marks and first layer before the shutdown and last night to do the via layer she had to correct the X by 0.3. There are still seems to be expansion as with flat at 12 the left side is not as centered as the right side of the wafer. I have called ASMl for help. I like to check this out not sure if is the process or the tool? From mahnaz at snf.stanford.edu Mon Jan 10 15:58:44 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:58:44 -0800 Subject: Problem asml SNF 2011-01-10 11:27:47: Drift in pm marks??? Message-ID: Ping, Joey and I went over Mary's process, do not see any drift and the system is up and running. From mahnaz at snf.stanford.edu Mon Jan 10 15:59:05 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:59:05 -0800 Subject: Comment asml SNF 2010-12-08 11:02:24: ASML Released Reservations 11:00-14:00 Message-ID: noted From mahnaz at snf.stanford.edu Mon Jan 10 15:59:09 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:59:09 -0800 Subject: Comment asml SNF 2010-12-09 10:58:50: ASML Released Reservations 11:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Mon Jan 10 15:59:17 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:59:17 -0800 Subject: Comment asml SNF 2010-11-23 10:16:47: Reservations released 11/23 Message-ID: From mahnaz at snf.stanford.edu Mon Jan 10 15:59:24 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:59:24 -0800 Subject: Comment asml SNF 2010-11-18 13:55:30: ASML Released Reservation from 2:00pm to 4;;00pm Message-ID: From mahnaz at snf.stanford.edu Mon Jan 10 15:59:32 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:59:32 -0800 Subject: Comment asml SNF 2010-11-30 11:50:29: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Mon Jan 10 15:59:40 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:59:40 -0800 Subject: Comment asml SNF 2010-12-01 11:18:10: ASML Released Reservations 11:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Jan 14 09:23:51 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 Jan 2011 09:23:51 -0800 Subject: Comment asml SNF 2011-01-14 09:23:50: ASML Released Reservations 9:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Tue Jan 18 09:19:19 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 18 Jan 2011 09:19:19 -0800 Subject: Comment asml SNF 2011-01-18 09:19:17: Hotspot ck Thank you Message-ID: No hotspots since 1/7/11! We would like to thank you for a great job in taking the extra effort in ensuring the back side of the wafers are clean before putting in the ASML! We really appreciate the users that have helped us in getting through the Daily Quals quickly. Thank you again! ASML & SNF From lindaohara at snf.stanford.edu Tue Jan 18 10:10:28 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 18 Jan 2011 10:10:28 -0800 Subject: Comment asml SNF 2011-01-18 10:10:27: ASML Released Reservations 10:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Jan 19 08:43:06 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 19 Jan 2011 08:43:06 -0800 Subject: Comment asml SNF 2011-01-19 08:43:05: ASML Released Reservations 9:00-14:00 Message-ID: From gsosa at snf.stanford.edu Wed Jan 19 10:36:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 10:36:40 -0800 Subject: Shutdown asml SNF 2011-01-19 10:36:38: Replacing port cover Message-ID: Replacing the port cover for the send unit From gsosa at snf.stanford.edu Wed Jan 19 11:27:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 11:27:09 -0800 Subject: Shutdown asml SNF 2011-01-19 10:36:38: Replacing port cover Message-ID: Replaced the input port cover. Adjusted strike plate for latch mechanism. Tested wafer handling with test job. All OK. From gsosa at snf.stanford.edu Thu Jan 20 09:30:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Jan 2011 09:30:25 -0800 Subject: Comment asml SNF 2011-01-20 09:30:25: Hotspot 1/20 Message-ID: Hotspot near major flat. Cleaned the E-table with tooling. Re-test-OK From lindaohara at snf.stanford.edu Thu Jan 20 11:54:27 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 20 Jan 2011 11:54:27 -0800 Subject: Comment asml SNF 2011-01-20 11:54:27: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Jan 21 10:12:15 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 Jan 2011 10:12:15 -0800 Subject: Comment asml SNF 2011-01-21 10:12:15: ASML Released Reservations 10:30-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Jan 24 06:54:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:54:51 -0800 Subject: Comment asml SNF 2010-11-18 07:57:49: ASML Demo on Disk 0 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:54:58 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:54:58 -0800 Subject: Comment asml SNF 2010-11-18 12:46:23: hotspot - 11/18 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:06 -0800 Subject: Comment asml SNF 2010-11-19 09:22:19: Hotspot Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:10 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:10 -0800 Subject: Comment asml SNF 2010-11-19 12:32:00: Hotspot 11/19 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:15 -0800 Subject: Comment asml SNF 2010-11-24 10:02:46: Hotspot 11/24 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:21 -0800 Subject: Comment asml SNF 2010-11-29 09:15:16: 2 hotspots 11/29 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:26 -0800 Subject: Comment asml SNF 2010-12-01 11:40:41: Hotspot 12/1 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:30 -0800 Subject: Comment asml SNF 2010-12-03 11:48:41: ASML Released Reservations 12:30-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:37 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:37 -0800 Subject: Comment asml SNF 2010-12-10 20:05:43: Stepper is up 12/10 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:41 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:41 -0800 Subject: Comment asml SNF 2010-12-13 09:00:53: 8" ASML Demo Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:55:46 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:55:46 -0800 Subject: Comment asml SNF 2010-12-14 16:53:02: ASML up for 4" on January 5th 2011 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:56:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:56:15 -0800 Subject: Comment asml SNF 2011-01-07 10:09:25: ASML Released Reservations 10:30-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:56:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:56:20 -0800 Subject: Comment asml SNF 2011-01-14 09:23:50: ASML Released Reservations 9:30-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:56:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:56:25 -0800 Subject: Comment asml SNF 2011-01-18 10:10:27: ASML Released Reservations 10:30-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:56:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:56:32 -0800 Subject: Comment asml SNF 2011-01-19 08:43:05: ASML Released Reservations 9:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:57:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:57:08 -0800 Subject: Comment asml SNF 2011-01-20 11:54:27: ASML Released Reservations 12:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Mon Jan 24 06:57:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Jan 2011 06:57:12 -0800 Subject: Comment asml SNF 2011-01-21 10:12:15: ASML Released Reservations 10:30-14:00 Message-ID: To Archives From lindaohara at snf.stanford.edu Fri Jan 28 09:56:05 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 28 Jan 2011 09:56:05 -0800 Subject: Comment asml SNF 2011-01-28 09:56:05: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Jan 31 10:17:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 31 Jan 2011 10:17:34 -0800 Subject: Comment asml SNF 2011-01-31 10:17:34: Hotspot 1/31 Message-ID: Hotspot on test wafer at 4 Oclock. Cleaned Echuck with tooling . Re-test OK