Comment asml SNF 2011-01-04 15:47:41: System Down 1/4

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jan 4 15:47:42 PST 2011

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The stepper is still down for the annual PM. In addition, the vendor is troubleshooting a reticle table problem. Work will continue tomorrow morning

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