Comment asml SNF 2011-01-06 11:26:17: Hotspot Ck

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Jan 6 11:26:18 PST 2011


Large Hotspot found at 4 o'clock position. Gary cleaned E-Chuck. Found, no hotspots, ok. 
FRIENDLY REMINDER FOR THE NEW YEAR, PLEASE CHECK THE BACK OF YOUR WAFERS BEFORE THEM THROUGH THE ASML.
Thanks,
Linda O
   




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