Problem asml SNF 2011-01-10 11:27:47: Drift in pm marks???

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Jan 10 11:27:48 PST 2011


It seems that a lab member experiencing a shift in pm marks
Mary has done the pm marks and first layer before the shutdown and
last night to do the via layer she had to correct the X by 0.3.
There are still seems to be expansion as with flat at 12 the left side is not as centered as the right side of the wafer.
I have called ASMl for help.
I like to check this out not sure if is the process or the tool?




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