From lindaohara at snf.stanford.edu Fri Jul 1 13:08:07 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 1 Jul 2011 13:08:07 -0700 Subject: Comment asml SNF 2011-07-01 13:08:07: ASML Released Reservations 13:30-16:00 Message-ID: From gsosa at snf.stanford.edu Tue Jul 5 06:50:41 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:50:41 -0700 Subject: Comment asml SNF 2011-04-19 15:53:22: Please Read- Important Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:51:10 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:51:10 -0700 Subject: Problem asml SNF 2011-04-29 17:00:25: Batch run error Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:51:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:51:52 -0700 Subject: Problem asml SNF 2011-04-29 20:30:41: wafer handling error Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:03 -0700 Subject: Comment asml SNF 2011-06-07 10:41:50: ASML Released Reservations 11:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:12 -0700 Subject: Comment asml SNF 2011-06-08 15:47:27: ASML MPM Day 1 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:18 -0700 Subject: Comment asml SNF 2011-06-09 15:08:24: ASML MPM Day 2 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:24 -0700 Subject: Comment asml SNF 2011-06-13 09:42:53: Reservations Released 6/13 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:35 -0700 Subject: Problem asml SNF 2011-06-16 15:39:50: ASML Stabilizing until 18:30 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:41 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:41 -0700 Subject: Comment asml SNF 2011-06-17 13:52:25: ASML Released Reservations 14:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:48 -0700 Subject: Comment asml SNF 2011-06-20 09:23:37: Hotspot 6/20 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:52:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:52:55 -0700 Subject: Comment asml SNF 2011-06-20 12:05:42: ASML Released Reservations 12:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:53:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:53:07 -0700 Subject: Comment asml SNF 2011-05-04 10:28:11: ASML 3D Calibration Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:53:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:53:13 -0700 Subject: Comment asml SNF 2011-06-21 13:24:07: ASML Released Reservations 14:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:53:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:53:22 -0700 Subject: Comment asml SNF 2011-06-21 13:25:02: ASML up Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:53:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:53:30 -0700 Subject: Comment asml SNF 2011-06-22 14:08:37: ASML Released Reservations 14:30-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:53:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:53:36 -0700 Subject: Comment asml SNF 2011-06-23 11:15:16: ASML Released Reservations 11:30-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 06:53:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 06:53:42 -0700 Subject: Comment asml SNF 2011-06-24 12:46:35: ASML Released Reservations 13:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Tue Jul 5 10:44:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jul 2011 10:44:14 -0700 Subject: Comment asml SNF 2011-07-05 10:44:13: Reservations Released 7/5 Message-ID: ASML Apps reservations released for the remainder of the day. Tool available for use. From pding at snf.stanford.edu Wed Jul 6 12:49:59 2011 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Wed, 6 Jul 2011 12:49:59 -0700 Subject: Comment asml SNF 2011-07-06 12:49:58: Matinenance Actions Message-ID: - replaced illumination lamp - performed disk to disk back up - Bert Mcguirk From lindaohara at snf.stanford.edu Thu Jul 7 11:56:02 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jul 2011 11:56:02 -0700 Subject: Comment asml SNF 2011-07-07 11:56:02: ASML Released Reservations 12:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Jul 8 12:04:59 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 Jul 2011 12:04:59 -0700 Subject: Comment asml SNF 2011-07-08 12:04:59: ASML Released Reservations 12:30-14:00 Message-ID: From narii at snf.stanford.edu Sat Jul 9 01:15:39 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 9 Jul 2011 01:15:39 -0700 Subject: Shutdown asml SNF 2011-07-09 01:15:39: Wafers stuck Message-ID: Wafers stuck and batch cancelled. There was 2 wafers but one of the wafers is lost while cancelling batch. From gsosa at snf.stanford.edu Mon Jul 11 09:13:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Jul 2011 09:13:34 -0700 Subject: Shutdown asml SNF 2011-07-09 01:15:39: Wafers stuck Message-ID: Removed stranded wafers from Pre-aligner and E-chuck. Did full start-up to re-initialize all subsystems. Users 2nd wafer failed transfer from Pre-aligner to Dipod due to vacuum errror. Re-tried users wafer- Still failed in same way. Users wafers appear to be clean and pass the granite test. The wafer that fails has some discoloration and surface roughness at minor flat and opposite the minor flat, probably from prior processing. This most likely caused the vacuum error. Performed daily monitors and exposed 3 wafers. All is OK. System ready to use. From lindaohara at snf.stanford.edu Tue Jul 12 12:06:32 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Jul 2011 12:06:32 -0700 Subject: Comment asml SNF 2011-07-12 12:06:32: ASML Released Reservations 12:30-14:00 Message-ID: From gyama at snf.stanford.edu Thu Jul 14 07:45:17 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 14 Jul 2011 07:45:17 -0700 Subject: Shutdown asml SNF 2011-07-14 07:45:16: stopped in middle of expose Message-ID: 1st TW went through fine, did you want to check? From lindaohara at snf.stanford.edu Thu Jul 14 08:03:15 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 14 Jul 2011 08:03:15 -0700 Subject: Shutdown asml SNF 2011-07-14 07:45:16: stopped in middle of expose Message-ID: Intialized Wafer Handling and moved wafer to output cassette. Ok to use From lindaohara at snf.stanford.edu Fri Jul 15 09:42:08 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 15 Jul 2011 09:42:08 -0700 Subject: Comment asml SNF 2011-07-15 09:42:08: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Tue Jul 19 12:47:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jul 2011 12:47:56 -0700 Subject: Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem Message-ID: There is a reticle stuck on the reticle table. Reticle handling will not initialize. 24 volts on RVR rack dropping out as well as an amplifier and DICM card for reticle library. From gsosa at snf.stanford.edu Tue Jul 19 16:01:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jul 2011 16:01:35 -0700 Subject: Comment asml SNF 2011-07-19 16:01:34: Stepper Down 7/19 Message-ID: The stepper is still down for a reticle management system problem. Most likely the Gripper theta amplifier board is bad. FSE to return tomorrow with parts and to continue troubleshooting. From mahnaz at snf.stanford.edu Wed Jul 20 08:00:20 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Jul 2011 08:00:20 -0700 Subject: Comment asml SNF 2011-07-20 08:00:20: Waiting for parts Message-ID: Linda has been making calls this morning, parts are to arrive hopefully tomorrow(??) FSE will trouble shoot after installing the parts so the system will be down today and tomorrwo for sure. From mahnaz at snf.stanford.edu Wed Jul 20 09:14:34 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Jul 2011 09:14:34 -0700 Subject: Problem asml SNF 2011-07-20 09:14:33: Reticle eroor card Message-ID: Mark K. 07/20/11 - Was reported the reticle was stuck on the Reticle table. - Found that the reticle was on the gripper and not on the table. - Pulled the gripper foward and manually removed the reticle. - put the gripper back into a wake up position, and performed init system failed to init for a digitial I/O error. - Rebooted the VRS rack and watched the initailization occurr, the gripper went up/down/up and stopped. - Noticed the MDCM card for Theta would error out every time. - Swapped the Theta card with the X card and the error followed the card. - Ordered a new card, ETA is on thursday. From gsosa at snf.stanford.edu Thu Jul 21 11:49:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jul 2011 11:49:25 -0700 Subject: Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem Message-ID: FSE troubleshot system and determined that the amplifier PC board for reticle "Theta" positioning was at fault. The PC board was replaced by FSE. Reticle management system now working correctly. Daily qual testing done. All is OK. System up and ready to use. From gsosa at snf.stanford.edu Thu Jul 21 11:49:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jul 2011 11:49:38 -0700 Subject: Comment asml SNF 2011-07-19 16:01:34: Stepper Down 7/19 Message-ID: From gsosa at snf.stanford.edu Thu Jul 21 11:49:45 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jul 2011 11:49:45 -0700 Subject: Comment asml SNF 2011-07-20 08:00:20: Waiting for parts Message-ID: FSE troubleshot system and determined that the amplifier PC board for reticle "Theta" positioning was at fault. The PC board was replaced by FSE. Reticle management system now working correctly. Daily qual testing done. All is OK. System up and ready to use. From gsosa at snf.stanford.edu Thu Jul 21 11:49:53 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jul 2011 11:49:53 -0700 Subject: Problem asml SNF 2011-07-20 09:14:33: Reticle eroor card Message-ID: FSE troubleshot system and determined that the amplifier PC board for reticle "Theta" positioning was at fault. The PC board was replaced by FSE. Reticle management system now working correctly. Daily qual testing done. All is OK. System up and ready to use. From gsosa at snf.stanford.edu Thu Jul 21 11:50:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jul 2011 11:50:44 -0700 Subject: Comment asml SNF 2011-07-21 11:50:44: Stepper is Up 7/21 Message-ID: FSE troubleshot system and determined that the amplifier PC board for reticle "Theta" positioning was at fault. The PC board was replaced by FSE. Reticle management system now working correctly. Daily qual testing done. All is OK. System up and ready to use. From gsosa at snf.stanford.edu Thu Jul 21 11:53:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jul 2011 11:53:22 -0700 Subject: Comment asml SNF 2011-07-21 11:53:21: Reservations Released 7/21 Message-ID: ASML reservations released for the remainder of the day. Tool is up and available to users for wafer processing. From gsosa at snf.stanford.edu Tue Jul 26 09:54:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 26 Jul 2011 09:54:11 -0700 Subject: Comment asml SNF 2011-07-26 09:54:11: Hotspot 7/26 Message-ID: 1 small hotspot in upper left quadrant of test wafer. Cleaned E-chuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Wed Jul 27 11:38:47 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 27 Jul 2011 11:38:47 -0700 Subject: Comment asml SNF 2011-07-27 11:38:46: Hotspot Ck-1 hotspot Message-ID: Found 1 hotspot right center. ASML cleaned E-Chuck. Hotspot ck ok, no hotspots From lindaohara at snf.stanford.edu Thu Jul 28 13:13:53 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 28 Jul 2011 13:13:53 -0700 Subject: Comment asml SNF 2011-07-28 13:13:53: ASML Released Reservations 13:30-16:00 Message-ID: From lindaohara at snf.stanford.edu Fri Jul 29 10:41:58 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 29 Jul 2011 10:41:58 -0700 Subject: Comment asml SNF 2011-07-29 10:41:57: ASML Released Reservations 11:00-16:00 Message-ID: From lindaohara at snf.stanford.edu Fri Jul 29 10:43:09 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 29 Jul 2011 10:43:09 -0700 Subject: Comment asml SNF 2011-07-29 10:43:09: Hotspot Ck- 1 hotspot 7/29 Message-ID: Found 1 hotspot lower right. SNF cleaned E-Chuck. Hotspot ck ok, no hotspots