Shutdown asml SNF 2011-07-09 01:15:39: Wafers stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jul 11 09:13:34 PDT 2011


Removed stranded wafers from Pre-aligner and E-chuck. Did full start-up to re-initialize all subsystems. Users 2nd wafer failed transfer from Pre-aligner to Dipod due to vacuum errror. Re-tried users wafer- Still failed in same way. Users wafers appear to be clean and pass the granite test.  The wafer that fails has some discoloration and surface roughness at minor flat and opposite the minor flat, probably from prior processing. This most likely caused the vacuum error. Performed daily monitors and exposed 3 wafers. All is OK. System ready to use.




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