Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem

gsosa at gsosa at
Tue Jul 19 12:47:56 PDT 2011

There is a reticle stuck on the reticle table. Reticle handling will not initialize.  24 volts on RVR rack dropping out as well as an amplifier and DICM card for  reticle library.

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