Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jul 19 12:47:56 PDT 2011

Previous message: Comment asml SNF 2011-07-15 09:42:08: ASML Released Reservations 10:00-14:00
Next message: Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

There is a reticle stuck on the reticle table. Reticle handling will not initialize.  24 volts on RVR rack dropping out as well as an amplifier and DICM card for  reticle library.

Previous message: Comment asml SNF 2011-07-15 09:42:08: ASML Released Reservations 10:00-14:00
Next message: Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list