Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jul 19 12:47:56 PDT 2011


There is a reticle stuck on the reticle table. Reticle handling will not initialize.  24 volts on RVR rack dropping out as well as an amplifier and DICM card for  reticle library.




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