Comment asml SNF 2011-07-19 16:01:34: Stepper Down 7/19

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jul 19 16:01:35 PDT 2011


The stepper is still down for a reticle management system problem. Most likely the Gripper theta amplifier board is bad. FSE to return tomorrow with parts and to continue troubleshooting.




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