Shutdown asml SNF 2011-07-19 12:47:56: Reticle handling problem

gsosa at gsosa at
Thu Jul 21 11:49:25 PDT 2011

FSE troubleshot system and determined that the amplifier PC board for reticle "Theta" positioning was at fault.  The PC board was replaced by FSE. Reticle management system now working correctly. Daily qual testing done. All is OK. System up and ready to use.

More information about the asml-pcs mailing list