Problem asml SNF 2011-07-20 09:14:33: Reticle eroor card

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jul 21 11:49:53 PDT 2011


FSE troubleshot system and determined that the amplifier PC board for reticle "Theta" positioning was at fault.  The PC board was replaced by FSE. Reticle management system now working correctly. Daily qual testing done. All is OK. System up and ready to use.




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