Shutdown asml SNF 2011-06-01 12:06:57: wafer stuck
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Wed Jun 1 12:06:57 PDT 2011
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Shutdown asml SNF 2011-06-01 12:06:57: wafer stuck
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only one wafer , I could not unload.
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