Shutdown asml SNF 2011-06-01 12:06:57: wafer stuck
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Wed Jun 1 13:56:45 PDT 2011
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Shutdown asml SNF 2011-06-01 12:06:57: wafer stuck
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Comment asml SNF 2011-06-02 08:30:04: ASML 6" Demo
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Removed the stranded wafer
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Shutdown asml SNF 2011-06-01 12:06:57: wafer stuck
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Comment asml SNF 2011-06-02 08:30:04: ASML 6" Demo
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