Shutdown asml SNF 2011-06-09 17:23:21: Wafer stuck in asml

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 10 07:37:07 PDT 2011


User specified 2 cassettes during batch setup instead of 2 wafers. Recovered the system by placing another cassette on port 4 with clean blank  wafers. The blank wafers were rejected through the tool and the batch aborted successfully.




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