Shutdown asml SNF 2011-06-28 07:51:22: light source does not turn on
wslee at snf.stanford.edu
wslee at snf.stanford.edu
Tue Jun 28 07:51:23 PDT 2011
There is an error message that says the 'light source fails to turn on' in the log and another error that says 'lamp power control unit error'. Unable to expose wafers.
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