Shutdown asml SNF 2011-06-28 07:51:22: light source does not turn on

wslee at snf.stanford.edu wslee at snf.stanford.edu
Tue Jun 28 07:51:23 PDT 2011


There is an error message that says the 'light source fails to turn on' in the log and another error that says 'lamp power control unit error'.  Unable to expose wafers.




More information about the asml-pcs mailing list