Shutdown asml SNF 2011-06-28 07:51:22: light source does not turn on

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jun 28 08:24:13 PDT 2011


There was a facilities CDA interuption at around 4:00am  that caused the lamp to shut off to prevent overheating. Facilities restored the CDA pressure around 7:00AM.  Restarted the UV lamp . Did full startup. Checked lamp uniformity and image quality with diagnostics tests- All; OK.




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