From lindaohara at snf.stanford.edu Tue Mar 1 09:23:03 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 1 Mar 2011 09:23:03 -0800 Subject: Problem asml SNF 2011-03-01 09:23:03: Intermittent Prob Carrier Inspection Message-ID: Intermittent prob with carrier inspection failed on port3. Check Carrier and retry inspection. From lindaohara at snf.stanford.edu Tue Mar 1 09:23:51 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 1 Mar 2011 09:23:51 -0800 Subject: Comment asml SNF 2011-03-01 09:23:50: ASML Released Reservations 9:30-14:00 Message-ID: From gsosa at snf.stanford.edu Tue Mar 1 15:20:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 15:20:36 -0800 Subject: Shutdown asml SNF 2011-03-01 15:20:35: Exhaust problem 3/1 Message-ID: From gsosa at snf.stanford.edu Tue Mar 1 17:51:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 17:51:03 -0800 Subject: Shutdown asml SNF 2011-03-01 15:20:35: Exhaust problem 3/1 Message-ID: Increased lamp exhaust to compensate for reduced flow. Re-started and warmed up lamp. Uniformity /intensity OK. IQC test OK. System ready for use. Please report any problems in coral. From lindaohara at snf.stanford.edu Wed Mar 2 10:03:53 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 2 Mar 2011 10:03:53 -0800 Subject: Comment asml SNF 2011-03-02 10:03:53: ASML Released Reservations 10:30-13:00 Message-ID: From gsosa at snf.stanford.edu Wed Mar 2 10:16:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Mar 2011 10:16:51 -0800 Subject: Comment asml SNF 2011-03-02 10:16:50: Hotspot 3/2 Message-ID: Hotspot on test wafer. Cleaned the E-chuck with tooling. Re-test OK. From haiwei at snf.stanford.edu Wed Mar 2 19:50:27 2011 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Wed, 2 Mar 2011 19:50:27 -0800 Subject: Shutdown asml SNF 2011-03-02 19:50:26: Batch aborted Message-ID: The batch is aborted after exposing one die. The batch is using the pm marks on the backside of the wafer. Bofore exposure, the wafer was tested on the granite table and the wafer can move all the way across the table without being slowed down. Right now the wafer is inside the machine and can't be removed. From joho at snf.stanford.edu Thu Mar 3 16:16:54 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 3 Mar 2011 16:16:54 -0800 Subject: Shutdown asml SNF 2011-03-02 19:50:26: Batch aborted Message-ID: Cleared the Wafer, and started day one of the MPM. Day 1 completed ok. From lindaohara at snf.stanford.edu Fri Mar 4 08:20:27 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Mar 2011 08:20:27 -0800 Subject: Comment asml SNF 2011-03-04 08:20:27: Start Day2 ASML MPM Message-ID: From bchui at snf.stanford.edu Sat Mar 5 23:44:12 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 5 Mar 2011 23:44:12 -0800 Subject: Problem asml SNF 2011-03-05 23:44:11: mis-blading Message-ID: Certain dies have more than the selected mask area exposed (not all die suffer from this problem..just a couple). From jcdoll at snf.stanford.edu Sun Mar 6 11:18:31 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 6 Mar 2011 11:18:31 -0800 Subject: Problem asml SNF 2011-03-06 11:18:31: wafer moving during exposure? Message-ID: images in the top and bottom left corners of my wafers have multiple 'ghost' exposures. it's like the wafer shifted while the lamp was on, because there are partially exposed image copies (e.g. text labels show up in multiple places although only one appears to have completely exposed the resist). this has been happening on 1-2 images per wafer, and most of the images look fine. for the exact same image, it might happen in the bottom left but not the top right of the wafer (or vice versa), and the severity of the problem varies between wafers. From gsosa at snf.stanford.edu Mon Mar 7 09:07:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 09:07:44 -0800 Subject: Comment asml SNF 2011-03-07 09:07:43: Hotspot 3/7 Message-ID: One hotspot in lower left quadrant. Cleaned e-chuck with tooling. Re-test OK. From gsosa at snf.stanford.edu Mon Mar 7 09:10:17 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 09:10:17 -0800 Subject: Shutdown asml SNF 2011-03-07 09:10:16: Ghost image Message-ID: There is a ghost image on hotspot wafer but not in every field. Possible rema or shutter problem. ASML notified and working with tech support for posssible cause and solutions. From gsosa at snf.stanford.edu Mon Mar 7 16:28:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 16:28:06 -0800 Subject: Shutdown asml SNF 2011-03-07 09:10:16: Ghost image Message-ID: FSE troubleshot and found shutter not closing completely. Adjusted shutter and verified operation. Confirmed with hotspot test wafer. No more ghost pattern. REMA System also checked out good with diagnostic wafer. System up and ready to use. From gsosa at snf.stanford.edu Mon Mar 7 16:28:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 16:28:14 -0800 Subject: Problem asml SNF 2011-03-06 11:18:31: wafer moving during exposure? Message-ID: FSE troubleshot and found shutter not closing completely. Adjusted shutter and verified operation. Confirmed with hotspot test wafer. No more ghost pattern. REMA System also checked out good with diagnostic wafer. System up and ready to use. From gsosa at snf.stanford.edu Mon Mar 7 16:28:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 16:28:26 -0800 Subject: Problem asml SNF 2011-03-05 23:44:11: mis-blading Message-ID: FSE troubleshot and found shutter not closing completely. Adjusted shutter and verified operation. Confirmed with hotspot test wafer. No more ghost pattern. REMA System also checked out good with diagnostic wafer. System up and ready to use. From gsosa at snf.stanford.edu Mon Mar 7 16:29:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Mar 2011 16:29:19 -0800 Subject: Comment asml SNF 2011-03-07 16:29:17: Stepper Status 3/7 Message-ID: Stepper is Up. FSE troubleshot and found shutter not closing completely. Adjusted shutter and verified operation. Confirmed with hotspot test wafer. No more ghost pattern. REMA System also checked out good with diagnostic wafer. System up and ready to use. From joho at snf.stanford.edu Tue Mar 8 10:08:55 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 8 Mar 2011 10:08:55 -0800 Subject: Comment asml SNF 2011-03-08 10:08:54: ASML Checking Overlay Message-ID: Checking Stepper's Overlay From joho at snf.stanford.edu Tue Mar 8 13:55:06 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 8 Mar 2011 13:55:06 -0800 Subject: Comment asml SNF 2011-03-08 13:55:05: ASML Stepper UP TIME ETA 1500 Message-ID: Delay's due to the track processing has pushed the verification of the Overlay out to around 3PM. Another update will be sent out later. From joho at snf.stanford.edu Tue Mar 8 15:38:20 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 8 Mar 2011 15:38:20 -0800 Subject: Problem asml SNF 2011-03-08 15:38:20: System is up for Front SIDE ONLY Message-ID: System is UP FOR FRONT SIDE ONLY, back side align is OOS and need's a setup. From joho at snf.stanford.edu Tue Mar 8 15:38:58 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 8 Mar 2011 15:38:58 -0800 Subject: Comment asml SNF 2011-03-08 15:38:58: ASML Stepper is up for FRONT SIDE ONLY Message-ID: System is UP FOR FRONT SIDE ONLY, back side align is OOS and need's a setup. Will schedule a time to setup the back side later. From lindaohara at snf.stanford.edu Wed Mar 9 11:18:45 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 9 Mar 2011 11:18:45 -0800 Subject: Comment asml SNF 2011-03-09 11:18:44: ASML Released Reservations 11:30-14:00 Message-ID: From edfei at snf.stanford.edu Wed Mar 9 21:50:03 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Wed, 9 Mar 2011 21:50:03 -0800 Subject: Comment asml SNF 2011-03-09 21:50:03: could not start batch Message-ID: System gave an error in port 3 and 4. Would not take in the wafers or start the batch. From lindaohara at snf.stanford.edu Thu Mar 10 10:02:22 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:02:22 -0800 Subject: Comment asml SNF 2011-03-10 10:02:21: ASML Released Reservations 10:30-14:00 Message-ID: From gsosa at snf.stanford.edu Fri Mar 11 07:21:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:21:22 -0800 Subject: Comment asml SNF 2011-02-15 14:46:44: Hotspot 02/15/11 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:21:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:21:29 -0800 Subject: Comment asml SNF 2011-02-16 09:04:03: Starting DEMO Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:21:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:21:34 -0800 Subject: Comment asml SNF 2011-02-17 14:45:56: ASML DEMO Complete Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:21:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:21:43 -0800 Subject: Comment asml SNF 2011-02-23 12:19:42: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:21:49 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:21:49 -0800 Subject: Comment asml SNF 2011-02-24 11:38:50: ASML Released Reservations 12:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:21:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:21:55 -0800 Subject: Comment asml SNF 2011-03-01 09:23:50: ASML Released Reservations 9:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:22:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:22:00 -0800 Subject: Comment asml SNF 2011-03-02 10:03:53: ASML Released Reservations 10:30-13:00 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:22:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:22:34 -0800 Subject: Comment asml SNF 2011-02-23 09:28:08: Hotspot Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:22:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:22:38 -0800 Subject: Comment asml SNF 2011-02-23 12:18:01: Hotspot ck ok Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:22:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:22:43 -0800 Subject: Comment asml SNF 2011-02-24 09:00:35: Hotspot ck Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:22:47 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:22:47 -0800 Subject: Comment asml SNF 2011-02-24 11:40:53: Hotspot 02/24 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:22:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:22:55 -0800 Subject: Comment asml SNF 2011-02-28 10:34:38: Hotspot 2/28 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:23:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:23:00 -0800 Subject: Comment asml SNF 2011-03-02 10:16:50: Hotspot 3/2 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 11 07:23:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Mar 2011 07:23:07 -0800 Subject: Comment asml SNF 2011-03-07 09:07:43: Hotspot 3/7 Message-ID: To Archive From lindaohara at snf.stanford.edu Fri Mar 11 08:36:51 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Mar 2011 08:36:51 -0800 Subject: Comment asml SNF 2011-03-11 08:36:49: Hotspot ck Message-ID: Hotspot at 11:00, Saeed cleaned E-Chuck. no hotspots From lindaohara at snf.stanford.edu Fri Mar 11 08:37:02 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Mar 2011 08:37:02 -0800 Subject: Comment asml SNF 2011-03-11 08:37:02: ASML Day4 MPM Message-ID: From lindaohara at snf.stanford.edu Fri Mar 11 14:42:42 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Mar 2011 14:42:42 -0800 Subject: Comment asml SNF 2011-03-11 14:42:42: ASML up for Frontside & Backside Message-ID: ASML up for Frontside and Backside. All in Spec. From luckys at snf.stanford.edu Sat Mar 12 23:12:49 2011 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Sat, 12 Mar 2011 23:12:49 -0800 Subject: Shutdown asml SNF 2011-03-12 23:12:48: Wafer got stuck! Message-ID: I put three wafers and only two came out. One is stuck inside the machine. The backside looked fine, so I am not sure what happenned. From gsosa at snf.stanford.edu Mon Mar 14 09:03:58 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Mar 2011 09:03:58 -0700 Subject: Shutdown asml SNF 2011-03-12 23:12:48: Wafer got stuck! Message-ID: Reset system software and hardware. Removed stranded wafer from system. Peerformed daily testing. All OK. From gsosa at snf.stanford.edu Tue Mar 15 09:01:01 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 15 Mar 2011 09:01:01 -0700 Subject: Comment asml SNF 2011-03-15 09:01:00: ASML Released reservations 9:00 - 11;00 Message-ID: ASML reservations from 9:00 to 11:00 are released. ASML F/S will use the tool from 11:00 to 2:00. The system is open to users until 11:00AM From gsosa at snf.stanford.edu Tue Mar 15 09:01:57 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 15 Mar 2011 09:01:57 -0700 Subject: Comment asml SNF 2011-03-15 09:01:57: Hotspot 3/15 Message-ID: Hotspot on test wafer at 5 Oclock. Cleaned with tooling and retested. Re-test OK. From gsosa at snf.stanford.edu Tue Mar 15 12:49:01 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 15 Mar 2011 12:49:01 -0700 Subject: Comment asml SNF 2011-03-15 12:49:01: ASML Reservations released 3/15 Message-ID: ASML reservations released for the remainder of the day. Tool is available. From gsosa at snf.stanford.edu Wed Mar 16 08:05:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 16 Mar 2011 08:05:08 -0700 Subject: Comment asml SNF 2011-03-16 08:05:07: Reservations released 3/16 Message-ID: ASML reservations released for the day. From gsosa at snf.stanford.edu Thu Mar 17 09:25:53 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Mar 2011 09:25:53 -0700 Subject: Comment asml SNF 2011-03-17 09:25:53: ASML Reservations released 3/17 Message-ID: ASML stepper reservations released for the remainder of the day. Tool is available to the lab for use. From gsosa at snf.stanford.edu Fri Mar 18 09:25:49 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Mar 2011 09:25:49 -0700 Subject: Comment asml SNF 2011-03-18 09:25:49: ASML Reservations Released 3/18 Message-ID: ASML stepper reservations released for the remainder of the day. The tool is available for use by labmembers. From grahamab at snf.stanford.edu Fri Mar 18 19:08:36 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 18 Mar 2011 19:08:36 -0700 Subject: Problem asml SNF 2011-03-18 19:08:35: Currently down; thinks there's a lost wafer Message-ID: Robot arm wouldn't pick up the wafer, eventually it had a panic attack and said there was a lost wafer somewhere in the tool. Aborting the batch didn't help. The same wafer went through fine approximately 45minutes earlier, so I'm not sure what has changed. There is currently NO wafer in the tool (was easy to recover it through the input port). Leaving yellow in case someone more qualified than me is able to recover the system. Sorry folks. From bchui at snf.stanford.edu Sat Mar 19 12:15:44 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 19 Mar 2011 12:15:44 -0700 Subject: Shutdown asml SNF 2011-03-19 12:15:44: See previous problem report Message-ID: Just changing the status to more accurately reflect the status of the machine (wafer handler frozen). I didn't touch it. From gsosa at snf.stanford.edu Mon Mar 21 08:44:50 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:44:50 -0700 Subject: Problem asml SNF 2011-03-18 19:08:35: Currently down; thinks there's a lost wafer Message-ID: Cleared the missing wafer error. DId full start-up- All OK. Performed daily quals. Cycled 3 wafers through the system. All OK. From gsosa at snf.stanford.edu Mon Mar 21 08:44:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:44:59 -0700 Subject: Shutdown asml SNF 2011-03-19 12:15:44: See previous problem report Message-ID: Cleared the missing wafer error. DId full start-up- All OK. Performed daily quals. Cycled 3 wafers through the system. All OK. From gsosa at snf.stanford.edu Mon Mar 21 08:46:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:46:21 -0700 Subject: Comment asml SNF 2011-03-21 08:46:20: Hotspot 3/21 Message-ID: Small hotspot on edge of wafer at 3:00. Cleaned E-chuck with tooling. Retest OK. From gsosa at snf.stanford.edu Mon Mar 21 08:48:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:48:26 -0700 Subject: Comment asml SNF 2011-03-04 08:20:27: Start Day2 ASML MPM Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:48:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:48:36 -0700 Subject: Comment asml SNF 2011-03-07 16:29:17: Stepper Status 3/7 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:48:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:48:48 -0700 Subject: Comment asml SNF 2011-03-09 11:18:44: ASML Released Reservations 11:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:48:54 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:48:54 -0700 Subject: Comment asml SNF 2011-03-11 08:36:49: Hotspot ck Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:48:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:48:59 -0700 Subject: Comment asml SNF 2011-03-10 10:02:21: ASML Released Reservations 10:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:49:05 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:49:05 -0700 Subject: Comment asml SNF 2011-03-11 08:37:02: ASML Day4 MPM Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:49:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:49:11 -0700 Subject: Comment asml SNF 2011-03-15 09:01:00: ASML Released reservations 9:00 - 11;00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:49:16 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:49:16 -0700 Subject: Comment asml SNF 2011-03-11 14:42:42: ASML up for Frontside & Backside Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:49:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:49:36 -0700 Subject: Comment asml SNF 2011-03-15 12:49:01: ASML Reservations released 3/15 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:49:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:49:42 -0700 Subject: Comment asml SNF 2011-03-16 08:05:07: Reservations released 3/16 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Mar 21 08:49:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Mar 2011 08:49:48 -0700 Subject: Comment asml SNF 2011-03-17 09:25:53: ASML Reservations released 3/17 Message-ID: To Archive From zzp at snf.stanford.edu Mon Mar 21 22:24:15 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Mon, 21 Mar 2011 22:24:15 -0700 Subject: Shutdown asml SNF 2011-03-21 22:24:15: same error as last Friday Message-ID: batch stopped at a system error, fast or full start up failed to retrieve the wafers inside From gsosa at snf.stanford.edu Tue Mar 22 10:25:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Mar 2011 10:25:40 -0700 Subject: Shutdown asml SNF 2011-03-21 22:24:15: same error as last Friday Message-ID: Robot failed to pick up wafer from input cassette by the robot. Reset system and recovered users wafers. Tested stepper operation. All functioning OK. Inspected users wafers. Wafers appear to have backside contamination that should have been discovered pryor to the stepper exposure operation. Wafers need to be 100% inspected and appropriate actions taken to remove contamination and prevent potential E-chuck contamination. If you need help in identifying B/S contamination or proper cleaning procedures, please contact Litho staff and we will help. From gsosa at snf.stanford.edu Tue Mar 22 10:33:50 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Mar 2011 10:33:50 -0700 Subject: Comment asml SNF 2011-03-22 10:33:50: Hotspot 3/22 Message-ID: Multiple hotspots on test wafer. Cleaned E-Chuck with tooling and retested. Retest-OK Users wafers need to be 100% inspected and appropriate actions taken to remove contamination and prevent potential E-chuck contamination. If you need help in identifying B/S contamination or proper cleaning procedures, please contact Litho staff and we will help you. From gsosa at snf.stanford.edu Tue Mar 22 10:37:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Mar 2011 10:37:08 -0700 Subject: Comment asml SNF 2011-03-22 10:37:08: Reservations released 3/22 Message-ID: ASML Stepper reservations released for the remainder of the day. Stepper is up and ready for use by labmembers. From kokab at snf.stanford.edu Tue Mar 22 21:16:52 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Tue, 22 Mar 2011 21:16:52 -0700 Subject: Shutdown asml SNF 2011-03-22 21:16:52: my wafers are stuck inside the tool Message-ID: From gsosa at snf.stanford.edu Wed Mar 23 09:23:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Mar 2011 09:23:12 -0700 Subject: Shutdown asml SNF 2011-03-22 21:16:52: my wafers are stuck inside the tool Message-ID: 2 wafers stranded in system( 1 on robot and 1 on discharge chuck). There were no system or wafer handling errors reported. Event log indicated that the batch of 2 wafers processed normally. At the end of the batch, the system generated a pop up message indicating that there was "No output cassette available" . The opereator response was either to "Resume batch" ( after visually checking if a cassette was present and placed correctly at the output port) or "Terminate Batch" . The User selected "Terminate batch" which ended batch processing with the wafers left in the system. Removed users wafers from the stepper. Tested system operation. All OK. From gsosa at snf.stanford.edu Wed Mar 23 09:23:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Mar 2011 09:23:52 -0700 Subject: Comment asml SNF 2011-03-23 09:23:52: Hotspot 3/23 Message-ID: Small hotspot at major flat. Cleaned with tooling. Retest OK. From lindaohara at snf.stanford.edu Wed Mar 23 09:39:23 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 23 Mar 2011 09:39:23 -0700 Subject: Comment asml SNF 2011-03-23 09:39:22: ASML Released Reservations 10:00-14:00 Message-ID: From ywidjaja at snf.stanford.edu Wed Mar 23 17:59:04 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Wed, 23 Mar 2011 17:59:04 -0700 Subject: Shutdown asml SNF 2011-03-23 17:59:04: wafer stuck on robot arm Message-ID: Loaded 1 wafer in the system. Wafer is sitting on the robot arm right now, before entering the alignment chamber (not exposed yet). Shutting down the system per Ping's instruction. Please help to unload wafer into a box (labeled ywidjaja) and 2 reticles (Zeno and SRI). From gsosa at snf.stanford.edu Thu Mar 24 12:12:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 24 Mar 2011 12:12:23 -0700 Subject: Shutdown asml SNF 2011-03-23 17:59:04: wafer stuck on robot arm Message-ID: Event log indicates that the stop button was pressed during wafer processing. Sometimes this does not work and will lock up the application software. Reset and restarted the applications software. Removed users wafers and reticles. Tested system operation- All OK. For the intermittent carrier inspection problem: Vendor checked the laser output for the dedection laser- Looked good. He also replaced carrier detection PC Board. We will monitor the event log to see if this resolves the carrier inspection problem. For the intermittent robot pick-up at input port problem: Vendor performed wafer handling calibration and updated M/C's. WH Calibration test results indicated significant updates needed for some take-over heights. Will also continue to monitor to see if this problem is resolved. From gsosa at snf.stanford.edu Thu Mar 24 12:13:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 24 Mar 2011 12:13:38 -0700 Subject: Comment asml SNF 2011-03-24 12:13:37: Hotspot 3/24 Message-ID: Hotspot on test wafer at 7 Oclock. Cleaned e-chuck with tooling and resested. Re-test OK. From pding at snf.stanford.edu Thu Mar 24 12:51:24 2011 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Thu, 24 Mar 2011 12:51:24 -0700 Subject: Comment asml SNF 2011-03-24 12:51:23: Carrier inspection failure Message-ID: System failed to scan the cassette in the first multiple trys From kokab at snf.stanford.edu Thu Mar 24 23:14:22 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Thu, 24 Mar 2011 23:14:22 -0700 Subject: Shutdown asml SNF 2011-03-24 23:14:22: wafer handler stopped Message-ID: From gsosa at snf.stanford.edu Fri Mar 25 09:02:28 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Mar 2011 09:02:28 -0700 Subject: Shutdown asml SNF 2011-03-24 23:14:22: wafer handler stopped Message-ID: Reviewed event log and batch report. Stepper was looking for another wafer to be loaded from the input cassette. In the batch report, The batch was set up for 2 wafers. There was only 1 wafer in the system so the system was generating a warning message that the input cessette had no wafers to complete the batch. Recovered users wafer from system. Performed daily quals. System Ok . From lindaohara at snf.stanford.edu Fri Mar 25 09:53:11 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 25 Mar 2011 09:53:11 -0700 Subject: Comment asml SNF 2011-03-25 09:53:10: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Mar 28 08:57:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Mar 2011 08:57:59 -0700 Subject: Comment asml SNF 2011-03-28 08:57:58: Hotspot 3/28 Message-ID: 2 small hotspots on test wafer at 7 and 11 oclock. Cleaned echuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Tue Mar 29 09:03:31 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 29 Mar 2011 09:03:31 -0700 Subject: Comment asml SNF 2011-03-29 09:03:31: ASML Released Reservations 9:30-12:30 Message-ID: From xuanwu at snf.stanford.edu Tue Mar 29 18:21:31 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 29 Mar 2011 18:21:31 -0700 Subject: Comment asml SNF 2011-03-29 18:21:31: reticle with no id inside snf box Message-ID: I left it in there. From lindaohara at snf.stanford.edu Wed Mar 30 12:11:07 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 30 Mar 2011 12:11:07 -0700 Subject: Comment asml SNF 2011-03-30 12:11:07: ASML Released Reservations 12:30-14:00 Message-ID: From gsosa at snf.stanford.edu Wed Mar 30 15:15:31 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Mar 2011 15:15:31 -0700 Subject: Comment asml SNF 2011-03-30 15:15:31: Hotspot 3/30 am Message-ID: 3 hotspots on test wafer this morning. Cleaned e-chuck with tooling. Retest OK. From gsosa at snf.stanford.edu Thu Mar 31 09:23:31 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Mar 2011 09:23:31 -0700 Subject: Comment asml SNF 2011-03-31 09:23:31: Hotspot 3/31 Message-ID: 1 hotspot at 10 Oclock. Cleaned e-chuck with tooling. Retest OK