Shutdown asml SNF 2011-03-01 15:20:35: Exhaust problem 3/1

gsosa at gsosa at
Tue Mar 1 17:51:03 PST 2011

Increased lamp exhaust to compensate for reduced flow. Re-started and warmed up lamp. Uniformity /intensity OK. IQC test OK. System ready for use. Please report any problems in coral.

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