Shutdown asml SNF 2011-03-02 19:50:26: Batch aborted

haiwei at snf.stanford.edu haiwei at snf.stanford.edu
Wed Mar 2 19:50:27 PST 2011


The batch is aborted after exposing one die. The batch is using the pm marks on the backside of the wafer. Bofore exposure, the wafer was tested on the granite table and the wafer can move all the way across the table without being slowed down.  
Right now the wafer is inside the machine and can't be removed. 




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