Shutdown asml SNF 2011-03-07 09:10:16: Ghost image

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 7 09:10:17 PST 2011


There is a ghost image on hotspot wafer but not in every field. Possible rema or shutter problem. ASML notified and working with tech support for posssible cause and solutions.




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