Problem asml SNF 2011-03-06 11:18:31: wafer moving during exposure?

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 7 16:28:14 PST 2011


FSE troubleshot and found shutter not closing completely. Adjusted shutter and verified operation. Confirmed with hotspot test wafer. No more ghost pattern. REMA System also checked out good with diagnostic wafer. System up and ready to use.




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