Comment asml SNF 2011-03-07 16:29:17: Stepper Status 3/7

gsosa at gsosa at
Mon Mar 7 16:29:19 PST 2011

Stepper is Up.
FSE troubleshot and found shutter not closing completely. Adjusted shutter and verified operation. Confirmed with hotspot test wafer. No more ghost pattern. REMA System also checked out good with diagnostic wafer. System up and ready to use.

More information about the asml-pcs mailing list