Comment asml SNF 2011-03-08 15:38:58: ASML Stepper is up for FRONT SIDE ONLY

joho at snf.stanford.edu joho at snf.stanford.edu
Tue Mar 8 15:38:58 PST 2011

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System is UP FOR FRONT SIDE ONLY, back side align is OOS and need's a setup. Will schedule a time to setup the back side later.

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