Shutdown asml SNF 2011-03-12 23:12:48: Wafer got stuck!

luckys at snf.stanford.edu luckys at snf.stanford.edu
Sat Mar 12 23:12:49 PST 2011

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I put three wafers and only two came out. One is stuck inside the machine. The backside looked fine, so I am not sure what happenned.

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