Problem asml SNF 2011-03-18 19:08:35: Currently down; thinks there's a lost wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 21 08:44:50 PDT 2011


Cleared the missing wafer error. DId full start-up- All OK. Performed daily quals. Cycled 3 wafers through the system. All OK.




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