Shutdown asml SNF 2011-03-19 12:15:44: See previous problem report

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 21 08:44:59 PDT 2011

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Cleared the missing wafer error. DId full start-up- All OK. Performed daily quals. Cycled 3 wafers through the system. All OK.

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