Shutdown asml SNF 2011-03-21 22:24:15: same error as last Friday

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Mar 22 10:25:40 PDT 2011


Robot failed to pick up wafer from input cassette by the robot. Reset system and recovered users wafers. Tested stepper operation. All functioning OK. Inspected users wafers. Wafers appear to have backside contamination that should have been discovered pryor to the stepper exposure operation.  Wafers need to be 100% inspected and appropriate actions taken to remove contamination and prevent potential E-chuck contamination. If you need help in identifying B/S contamination or proper cleaning procedures, please contact Litho staff and we will help. 




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