Comment asml SNF 2011-03-22 10:33:50: Hotspot 3/22

[gsosa at snf.stanford.edu]

Multiple hotspots on test wafer.  Cleaned E-Chuck with tooling and retested. Retest-OK   Users wafers need to be 100% inspected and appropriate actions taken to remove contamination and prevent potential E-chuck contamination. If you need help in identifying B/S contamination or proper cleaning procedures, please contact Litho staff and we will help you.