Comment asml SNF 2011-03-22 10:33:50: Hotspot 3/22

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Mar 22 10:33:50 PDT 2011


Multiple hotspots on test wafer.  Cleaned E-Chuck with tooling and retested. Retest-OK   Users wafers need to be 100% inspected and appropriate actions taken to remove contamination and prevent potential E-chuck contamination. If you need help in identifying B/S contamination or proper cleaning procedures, please contact Litho staff and we will help you. 




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