Shutdown asml SNF 2011-03-22 21:16:52: my wafers are stuck inside the tool

gsosa at gsosa at
Wed Mar 23 09:23:12 PDT 2011

2 wafers stranded in system( 1 on robot and 1 on discharge chuck). There were no system or wafer handling errors reported. Event log indicated that the batch of 2 wafers processed normally. At the end of the batch, the system generated a pop up message indicating that there was "No output cassette available" . The opereator response was either to "Resume batch" ( after visually checking if a cassette was present and placed correctly at the output port) or "Terminate Batch" .  The User selected "Terminate batch" which ended batch processing with the wafers left in the system. Removed users wafers from the stepper.  Tested system operation. All OK.

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