Comment asml SNF 2011-03-23 09:23:52: Hotspot 3/23
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Wed Mar 23 09:23:52 PDT 2011
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Shutdown asml SNF 2011-03-22 21:16:52: my wafers are stuck inside the tool
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Comment asml SNF 2011-03-23 09:39:22: ASML Released Reservations 10:00-14:00
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Small hotspot at major flat. Cleaned with tooling. Retest OK.
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Shutdown asml SNF 2011-03-22 21:16:52: my wafers are stuck inside the tool
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Comment asml SNF 2011-03-23 09:39:22: ASML Released Reservations 10:00-14:00
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