Shutdown asml SNF 2011-03-23 17:59:04: wafer stuck on robot arm

[ywidjaja at snf.stanford.edu]

Loaded 1 wafer in the system. Wafer is sitting on the robot arm right now, before entering the alignment chamber (not exposed yet). Shutting down the system per Ping's instruction.
Please help to unload wafer into a box (labeled ywidjaja) and 2 reticles (Zeno and SRI).