Shutdown asml SNF 2011-03-23 17:59:04: wafer stuck on robot arm

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Mar 24 12:12:23 PDT 2011


Event log indicates that the stop button was pressed during wafer processing. Sometimes this does not work and will lock up the application software. Reset and restarted the applications software. Removed users wafers and reticles. Tested system operation- All OK. For the intermittent carrier inspection problem: Vendor checked the laser output for the dedection laser- Looked good. He also replaced carrier detection PC Board. We will monitor the event log to see if this resolves the carrier inspection problem. For the intermittent robot pick-up at input port problem: Vendor performed wafer handling calibration and updated M/C's. WH Calibration test results indicated significant updates needed for some take-over heights. Will also continue to monitor to see if this problem is resolved.




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