Shutdown asml SNF 2011-03-24 23:14:22: wafer handler stopped
kokab at snf.stanford.edu
kokab at snf.stanford.edu
Thu Mar 24 23:14:22 PDT 2011
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Comment asml SNF 2011-03-24 12:51:23: Carrier inspection failure
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Shutdown asml SNF 2011-03-24 23:14:22: wafer handler stopped
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Shutdown asml SNF 2011-03-24 23:14:22: wafer handler stopped
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