Shutdown asml SNF 2011-03-24 23:14:22: wafer handler stopped

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 25 09:02:28 PDT 2011


Reviewed event log and batch report. Stepper was looking for another wafer to be loaded from the input cassette. In the batch report,  The batch was set up for 2 wafers. There was only 1 wafer in the system so the system was generating a warning message that the input cessette had no wafers to complete the batch. Recovered users wafer from system. Performed daily quals. System Ok .




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